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Inventor

YU HSIU CHEN

Inventor
TW

Overview

1→
Patents
2025
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material50%
H01JElectric discharge tubes or discharge lamps50%
PatentTitleYear
12,374,525Plasma processing tool and operating method thereof2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (1)· patent assignee history
2025Based in TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD12025
Locations
LocationPatentsSpan
TW12025