Inventor
Johann Bartha
Inventor
Aidlingen, DE
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
Y10Sprimary
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
G01QScanning-probe techniques or apparatus14%
Y10TTechnical subjects covered by former us classification11%
C23CCoating metallic material8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
H01JElectric discharge tubes or discharge lamps8%
B82YSpecific uses or applications of nanostructures5%
B26FPerforating3%
B41JTypewriters3%
PatentTitleYear
6,218,264'Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range'20016,061,074'Ion generator for ionographic print heads'20005,960,255'Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it'19995,791,959'Method of fabricating a field emission device'19985,717,278'Field emission device and method for fabricating it'19985,707,537'Bulk removal, transport and storage fixture for small batch-fabricated devices'19985,665,905'Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it'19975,658,472'Method for producing deep vertical structures in silicon substrates'19975,641,610'Method for producing a multi-step structure in a substrate'19975,635,337'Method for producing a multi-step structure in a substrate'19975,534,359'Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it'19965,304,278'Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity'19945,296,091'Method of etching substrates having a low thermal conductivity'19945,162,133'Process for fabricating silicon carbide films with a predetermined stress'19925,116,462'Method of producing micromechanical sensors for the AFM/STM profilometry'19924,969,415'PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides'19904,918,033'PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides'19904,871,418'Process for fabricating arbitrarily shaped through holes in a component'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–2001Patents assigned to IBM (18)· patent assignee history
1989–1994Based in Sindelfingen, DE· patent location history
1996–2001Based in Aidlingen, DE· patent location history
1997Based in Aidlingen-Dachtel, DE· patent location history
1998–2000Based in Metelen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 18 | 1989–2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aidlingen, DE | 7 | 1996–2001 |
| Sindelfingen, DE | 7 | 1989–1994 |
| Metelen, DE | 2 | 1998–2000 |
| Aidlingen-Dachtel, DE | 2 | 1997 |