Inventor
Sjoerd Nicolaas Lambertus Donders
Inventor
's-Hertogenbosch, NL
Overview
Patents· 218 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices63%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
H01LSemiconductor devices2%
B05DProcesses for applying fluent materials to surfaces, in general2%
B22FWorking metallic powder2%
B23KSoldering or unsoldering2%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling2%
B33YAdditive manufacturing, i.e. manufacturing of three-dimensional [3d] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3d printing, stereolithography or selective laser sintering2%
Y02PClimate change mitigation technologies in the production or processing of goods2%
B01DSeparation1%
PatentTitleYear
11,016,394Lithographic apparatus and device manufacturing method202110,962,891Lithographic apparatus and device manufacturing method202110,935,895Lithographic apparatus202110,898,955Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder202110,875,096Substrate holder and method of manufacturing a substrate holder202010,866,501Lithographic apparatus and device manufacturing method202010,788,755Lithographic apparatus and device manufacturing method202010,761,438Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets202010,747,125Support apparatus, lithographic apparatus and device manufacturing method202010,739,684Lithographic apparatus and device manufacturing method202010,705,439Lithographic apparatus and device manufacturing method202010,705,432Lithographic apparatus and device manufacturing method202010,684,554Lithographic apparatus and device manufacturing method202010,678,139Lithographic apparatus and device manufacturing method202010,649,349Lithographic apparatus, a dryer and a method of removing liquid from a surface202010,630,037Apparatus for delivering gas and illumination source for generating high harmonic radiation202010,599,054Lithographic apparatus and device manufacturing method202010,530,111Apparatus for delivering gas and illumination source for generating high harmonic radiation202010,509,326Lithographic apparatus and device manufacturing method201910,503,084Lithographic apparatus and device manufacturing method201910,495,984Lithographic apparatus and device manufacturing method201910,488,759Lithographic apparatus and device manufacturing method201910,466,595Lithographic apparatus and device manufacturing method201910,451,973Lithographic apparatus and device manufacturing method201910,444,644Lithographic apparatus and device manufacturing method201910,386,725Lithographic apparatus and device manufacturing method201910,353,296Lithographic apparatus and device manufacturing method201910,345,712Lithographic apparatus and device manufacturing method201910,338,478Lithographic apparatus and device manufacturing method201910,331,047Lithographic apparatus and device manufacturing method201910,261,428Lithographic apparatus and device manufacturing method201910,248,033Lithographic apparatus and device manufacturing method201910,245,641Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder201910,234,768Lithographic apparatus and device manufacturing method201910,216,101Reflector201910,209,629Lithographic apparatus and device manufacturing method201910,191,389Lithographic apparatus and device manufacturing method201910,185,231Lithographic apparatus, a dryer and a method of removing liquid from a surface201910,180,629Lithographic apparatus and device manufacturing method201910,146,143Lithographic apparatus and device manufacturing method201810,120,292Support apparatus, lithographic apparatus and device manufacturing method201810,095,128Thermal conditioning method201810,025,196Lithographic apparatus and device manufacturing method20189,989,861Lithographic apparatus and device manufacturing method20189,983,482Radiation collector, radiation source and lithographic apparatus20189,952,514Lithographic apparatus and device manufacturing method20189,952,515Lithographic apparatus and device manufacturing method20189,904,185'Lithographic apparatus and device manufacturing method'20189,885,965'Lithographic apparatus and device manufacturing method'20189,857,695'Lithographic apparatus and device manufacturing method'20189,829,799Lithographic apparatus and device manufacturing method20179,804,509'Lithographic apparatus and device manufacturing method'20179,798,246'Lithographic apparatus and device manufacturing method'20179,766,556'Lithographic apparatus and device manufacturing method'20179,753,380'Lithographic apparatus and device manufacturing method'20179,746,788'Lithographic apparatus and device manufacturing method'20179,740,107'Lithographic apparatus and device manufacturing method'20179,737,934'Substrate holder and method of manufacturing a substrate holder'20179,703,210'Lithographic apparatus and device manufacturing method'20179,684,249'Lithographic apparatus with a metrology system for measuring a position of a substrate table'20179,632,425'Lithographic apparatus, a dryer and a method of removing liquid from a surface'20179,623,436'Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets'20179,618,859'Lithographic apparatus and device manufacturing method'20179,606,449'Lithographic apparatus and device manufacturing method'20179,594,308'Lithographic apparatus and device manufacturing method'20179,588,442'Lithographic apparatus and device manufacturing method'20179,581,914'Lithographic apparatus and device manufacturing method'20179,568,840'Lithographic apparatus and device manufacturing method'20179,541,843'Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid'20179,507,274'Substrate holder and method of manufacturing a substrate holder'20169,507,278'Lithographic apparatus and device manufacturing method'20169,507,275'Support apparatus, lithographic apparatus and device manufacturing method'20169,488,923'Lithographic apparatus and device manufacturing method'20169,482,966'Lithographic apparatus and device manufacturing method'20169,477,160'Lithographic apparatus and device manufacturing method'20169,477,153'Lithographic apparatus and device manufacturing method'20169,448,494'Lithographic apparatus and device manufacturing method'20169,442,395'Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder'20169,436,097'Lithographic apparatus and device manufacturing method'20169,429,853'Lithographic apparatus and device manufacturing method'20169,383,654'Fluid handling structure, lithographic apparatus and device manufacturing method'20169,366,972'Lithographic apparatus and device manufacturing method'20169,360,765'Lithographic apparatus and device manufacturing method'20169,285,686'Lithographic apparatus involving an immersion liquid supply system with an aperture'20169,280,063'Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method'20169,235,113'Lithographic apparatus and device manufacturing method'20169,229,335'Lithographic apparatus and device manufacturing method'20169,213,247'Lithographic apparatus and device manufacturing method'20159,207,543'Lithographic apparatus and device manufacturing method involving a groove to collect liquid'20159,152,058'Lithographic apparatus and device manufacturing method involving a member and a fluid opening'20159,146,478'Lithographic apparatus and device manufacturing method'20159,141,003'Lithographic apparatus and device manufacturing method'20159,134,623'Lithographic apparatus and device manufacturing method'20159,134,622'Lithographic apparatus and device manufacturing method'20159,104,117'Lithographic apparatus having a liquid detection system'20159,097,992'Lithographic apparatus and device manufacturing method'20159,099,501'Lithographic apparatus and device manufacturing method'20159,097,987'Lithographic apparatus and device manufacturing method'20159,081,300'Lithographic apparatus and device manufacturing method'20159,081,299'Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap'20159,057,967'Lithographic apparatus and device manufacturing method'20159,025,127'Lithographic apparatus and device manufacturing method'20158,988,651'Lithographic apparatus and device manufacturing method'20158,982,316'Lithographic apparatus, a metrology apparatus and a method of using the apparatus'20158,976,334'Lithographic apparatus and device manufacturing method'20158,976,333'Lithographic apparatus and lithographic apparatus cooling method'20158,964,164'Lithographic apparatus and device manufacturing method'20158,953,141'Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid'20158,953,144'Lithographic apparatus and device manufacturing method'20158,941,811'Lithographic apparatus and device manufacturing method'20158,937,704'Lithographic apparatus and device manufacturing method involving a resistivity sensor'20158,934,082'Lithographic apparatus and device manufacturing method'20158,860,924'Lithographic apparatus and device manufacturing method'20148,848,165'Lithographic apparatus and device manufacturing method'20148,755,033'Lithographic apparatus and device manufacturing method involving a barrier to collect liquid'20148,755,027'Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid'20148,755,028'Lithographic apparatus and device manufacturing method'20148,724,084'Lithographic apparatus and device manufacturing method'20148,724,083'Lithographic apparatus and device manufacturing method'20148,711,333'Lithographic apparatus and device manufacturing method'20148,704,998'Lithographic apparatus and device manufacturing method involving a barrier to collect liquid'20148,687,168'Lithographic apparatus and device manufacturing method'20148,681,311'Lithographic apparatus and device manufacturing method'20148,638,415'Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets'20148,638,419'Lithographic apparatus and device manufacturing method'20148,634,056'Lithographic apparatus and device manufacturing method'20148,629,971'Lithographic apparatus and device manufacturing method'20148,610,089'Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method'20138,564,760'Lithographic apparatus, device manufacturing method and a control system'20138,558,989'Lithographic apparatus and device manufacturing method'20138,547,519'Lithographic apparatus and device manufacturing method'20138,482,845'Lithographic apparatus and device manufacturing method'20138,481,978'Lithographic apparatus and device manufacturing method'20138,472,002'Lithographic apparatus and device manufacturing method'20138,451,422'Re-flow and buffer system for immersion lithography'20138,446,568'Lithographic apparatus and device manufacturing method'20138,446,563'Lithographic apparatus and device manufacturing method'20138,427,629'Lithographic apparatus and device manufacturing method'20138,354,209'Lithographic apparatus and device manufacturing method'20138,334,983'Lithographic apparatus and device manufacturing method'20128,319,939'Immersion lithographic apparatus and device manufacturing method detecting residual liquid'20128,259,287'Lithographic apparatus and device manufacturing method'20128,248,577'Lithographic apparatus and device manufacturing method'20128,208,120'Lithographic apparatus and device manufacturing method'20128,154,708'Lithographic apparatus and device manufacturing method'20128,149,379'Lithographic apparatus and device manufacturing method'20128,142,852'Lithographic apparatus and device manufacturing method'20128,138,486'Lithographic apparatus and device manufacturing method'20128,120,749'Lithographic apparatus and device manufacturing method'20128,115,903'Lithographic apparatus and device manufacturing method'20128,115,899'Lithographic apparatus and device manufacturing method'20128,102,507'Lithographic apparatus and device manufacturing method'20128,031,325'Lithographic apparatus and device manufacturing method'20118,027,026'Lithographic apparatus and device manufacturing method'20118,027,019'Lithographic apparatus and device manufacturing method'20118,023,101'Lithographic apparatus and device manufacturing method'20118,004,652'Lithographic apparatus and device manufacturing method'20117,936,444'Lithographic apparatus and device manufacturing method'20117,932,999'Lithographic apparatus and device manufacturing method'20117,929,112'Lithographic apparatus and device manufacturing method'20117,928,407'Lithographic apparatus and device manufacturing method'20117,898,642'Lithographic apparatus and device manufacturing method'20117,894,040'Lithographic apparatus and device manufacturing method'20117,884,919'Lithographic apparatus and device manufacturing method'20117,880,860'Lithographic apparatus and device manufacturing method'20117,839,483'Lithographic apparatus, device manufacturing method and a control system'20107,834,977'Lithographic apparatus and device manufacturing method'20107,834,974'Lithographic apparatus and device manufacturing method'20107,812,924'Lithographic apparatus and device manufacturing method'20107,808,614'Lithographic apparatus and device manufacturing method'20107,779,781'Lithographic apparatus and device manufacturing method'20107,733,459'Lithographic apparatus and device manufacturing method'2010RE041307'Mask for clamping apparatus, e.g. for a lithographic apparatus'20107,705,962'Lithographic apparatus and device manufacturing method'20107,701,550'Lithographic apparatus and device manufacturing method'20107,670,730'Lithographic apparatus and device manufacturing method'20107,652,751'Lithographic apparatus and device manufacturing method'20107,643,127'Prewetting of substrate before immersion exposure'20107,633,073'Lithographic apparatus and device manufacturing method'20097,616,383'Lithographic apparatus and device manufacturing method'20097,602,470'Lithographic apparatus and device manufacturing method'20097,593,093'Lithographic apparatus and device manufacturing method'20097,593,092'Lithographic apparatus and device manufacturing method'20097,583,357'Lithographic apparatus and device manufacturing method'20097,557,901'Lithographic apparatus and device manufacturing method'20097,528,929'Lithographic apparatus and device manufacturing method'20097,522,261'Lithographic apparatus and device manufacturing method'20097,486,384'Lithographic support structure'20097,474,379'Lithographic apparatus and device manufacturing method'20097,468,779'Lithographic apparatus and device manufacturing method'20087,463,330'Lithographic apparatus and device manufacturing method'20087,459,701'Stage apparatus, lithographic apparatus and device manufacturing method'20087,433,016'Lithographic apparatus and device manufacturing method'20087,411,654'Lithographic apparatus and device manufacturing method'20087,379,155'Lithographic apparatus and device manufacturing method'20087,379,159'Lithographic apparatus and device manufacturing method'20087,375,796'Lithographic apparatus and device manufacturing method'20087,372,541'Lithographic apparatus and device manufacturing method'20087,352,434'Lithographic apparatus and device manufacturing method'20087,307,696'Lithographic apparatus and device manufacturing method'20077,248,334'Sensor shield'20077,224,436'Lithographic apparatus and device manufacturing method'20077,213,963'Lithographic apparatus and device manufacturing method'20077,199,858'Lithographic apparatus and device manufacturing method'20077,196,770'Prewetting of substrate before immersion exposure'20077,184,122'Lithographic apparatus and device manufacturing method'20077,161,654'Lithographic apparatus and device manufacturing method'20077,161,663'Lithographic apparatus'20077,119,874'Lithographic apparatus and device manufacturing method'20067,110,081'Lithographic apparatus and device manufacturing method'20067,078,715'Lithographic apparatus and apparatus adjustment method'20067,075,616'Lithographic apparatus and device manufacturing method'20067,034,917'Lithographic apparatus, device manufacturing method and device manufactured thereby'20067,016,019'Lithographic apparatus and device manufacturing method'20066,956,222'Lithographic apparatus and method of manufacturing a device'20056,856,376'Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby'20056,781,673'Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby'20046,480,260'Mask clamping apparatus, e.g. for a lithographic apparatus'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2021Patents assigned to ASML NETHERLANDS BV (217)· patent assignee history
2002–2021Based in 's-Hertogenbosch, NL· patent location history
2009–2021Based in Vught, NL· patent location history
2010Based in s'Hertogenbosch, NL· patent location history
2012–2020Patents assigned to DONDERS SJOERD NICOLAAS LAMBERTUS (68)· patent assignee history
2012–2017Patents assigned to HOOGENDAM CHRISTIAAN ALEXANDER (43)· patent assignee history
2012–2017Patents assigned to STREEFKERK BOB (43)· patent assignee history
2012–2017Patents assigned to MERTENS JEROEN JOHANNES SOPHIA MARIA (37)· patent assignee history
2019Based in Veldhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 217 | 2002–2021 |
| DONDERS SJOERD NICOLAAS LAMBERTUSself | 68 | 2012–2020 |
| HOOGENDAM CHRISTIAAN ALEXANDER | 43 | 2012–2017 |
| STREEFKERK BOB | 43 | 2012–2017 |
| MERTENS JEROEN JOHANNES SOPHIA MARIA | 37 | 2012–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| 's-Hertogenbosch, NL | 147 | 2002–2021 |
| Vught, NL | 69 | 2009–2021 |
| Veldhoven, NL | 1 | 2019 |
| s'Hertogenbosch, NL | 1 | 2010 |