LexDanaLexDanabeta
Inventor

Silvia Rocio Aguilar Amaya

Inventor
San Jose, CA, US

Overview

2→
Patents
2019–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
G01BMeasuring length, thickness or similar linear dimensions25%
H01LSemiconductor devices25%
PatentTitleYear
10,566,216Equipment front end module gas recirculation202010,190,865Verifying end effector flatness using electrical continuity2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2020Patents assigned to LAM RES CORP (2)· patent assignee history
2019–2020Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP22019–2020
Locations
LocationPatentsSpan
San Jose, California, US22019–2020