Inventor
Tamio Matsumura
Inventor
Tokyo, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B24BMachines, devices, or processes for grinding or polishing13%
H10DInorganic electric semiconductor devices13%
G05BControl or regulating systems in general7%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes7%
H01JElectric discharge tubes or discharge lamps7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
Y02PClimate change mitigation technologies in the production or processing of goods7%
PatentTitleYear
10,134,598Method for manufacturing semiconductor device20189,659,808'Semiconductor-element manufacturing method and wafer mounting device using a vacuum end-effector'20178,987,122'Method of manufacturing semiconductor device'20158,183,144'Method of manufacturing semiconductor device'20128,097,533'Method of manufacturing semiconductor device'20126,595,428'Process control device and process control method using a medium with rewritable marking technique'20035,679,204'Plasma apparatus'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2018Patents assigned to MITSUBISHI ELECTRIC CORP (6)· patent assignee history
1997Patents assigned to RYODEN SEMICONDUCTOR SYST ENG (1)· patent assignee history
1997Patents assigned to SHIKOKU INSTRUMENTATION CO LTD (1)· patent assignee history
1997–2018Based in Tokyo, JP· patent location history
2003Based in Hyogo, JP· patent location history
2012–2015Patents assigned to MATSUMURA TAMIO (2)· patent assignee history
2015Patents assigned to NAKATA KAZUNARI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MITSUBISHI ELECTRIC CORP | 6 | 1997–2018 |
| MATSUMURA TAMIOself | 2 | 2012–2015 |
| NAKATA KAZUNARI | 1 | 2015 |
| RYODEN SEMICONDUCTOR SYST ENG | 1 | 1997 |
| SHIKOKU INSTRUMENTATION CO LTD | 1 | 1997 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 6 | 1997–2018 |
| Hyogo, JP | 1 | 2003 |