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Inventor

KAZUHIRO TAKESHITA

Inventor
JP

Overview

1→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H05BElectric heating25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
11,476,136Substrate processing apparatus and method of adjusting substrate processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2022Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12022
Locations
LocationPatentsSpan
JP12022