Inventor
DUAN-FU STEPHEN HSU
Inventor
US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices81%
G06FElectric digital data processing14%
G05BControl or regulating systems in general5%
PatentTitleYear
12,510,828Method for controlling a manufacturing process and associated apparatuses202512,339,583Optimization using a non-uniform illumination intensity profile202512,222,656Method for determining aberration sensitivity of patterns202512,210,291Aberration impact systems, models, and manufacturing processes202512,092,963Method of determining characteristic of patterning process based on defect for reducing hotspot202411,977,334Wavefront optimization for tuning scanner based on performance matching202411,892,776Imaging via zeroth order suppression202411,886,124Flows of optimization for patterning processes202411,846,889Method and apparatus for diffraction pattern guided source mask optimization202311,815,808Method for high numerical aperture thru-slit source mask optimization202311,747,739Method and apparatus for imaging using narrowed bandwidth202311,681,849Method for optimizing a patterning device pattern202311,586,114Wavefront optimization for tuning scanner based on performance matching202311,506,984Simulation of lithography using multiple-sampling of angular distribution of source radiation202211,487,198Patterning device, a method of making the same, and a patterning device design method202211,480,882Flows of optimization for patterning processes202211,137,690Flows of optimization for patterning processes2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to ASML NETHERLANDS BV (17)· patent assignee history
2021–2025Based in US· patent location history
2023Patents assigned to ASML NETHERLANDS (1)· patent assignee history
2023Patents assigned to Cymer LLC (1)· patent assignee history
2025Patents assigned to ASML HOLDING NV (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 17 | 2021–2025 |
| ASML HOLDING NV | 1 | 2025 |
| ASML NETHERLANDS | 1 | 2023 |
| Cymer LLC | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 17 | 2021–2025 |