Inventor
Sima Salamati-Saradh
Inventor
Plano, TX, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices23%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests23%
H10DInorganic electric semiconductor devices15%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
B08BCleaning in general8%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
PatentTitleYear
6,395,102'Method and apparatus for in-situ reticle cleaning at photolithography tool'20026,305,097'Apparatus for in-situ reticle cleaning at photolithography tool'20016,222,228'Method for reducing gate oxide damage caused by charging'20016,218,218'Method for reducing gate oxide damage caused by charging'20015,978,078'System and method for detecting particles on substrate-supporting chucks of photolithography equipment'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2002Patents assigned to TEXAS INSTRUMENTS INC (5)· patent assignee history
1999–2002Based in Plano, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEXAS INSTRUMENTS INC | 5 | 1999–2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Plano, Texas, US | 5 | 1999–2002 |