Inventor
Lior HULI
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
H01LSemiconductor devices17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
B08BCleaning in general6%
H10BElectronic memory devices6%
H10DInorganic electric semiconductor devices6%
B01FMixing, e.g. dissolving, emulsifying or dispersing3%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems3%
B82YSpecific uses or applications of nanostructures3%
PatentTitleYear
12,598,747Fabricating three-dimensional semiconductor structures202612,406,887Selective film formation using a self-assembled monolayer202512,393,121Point-of-use blending of rinse solutions for EUV processing to mitigate pattern collapse202512,216,400Directed self-assembly202512,193,231Fabricating three-dimensional semiconductor structures202512,080,599Methods for forming self-aligned contacts using spin-on silicon carbide202411,762,297Point-of-use blending of rinse solutions to mitigate pattern collapse202311,482,454Methods for forming self-aligned contacts using spin-on silicon carbide202211,383,211Point-of-use dynamic concentration delivery system with high flow and high uniformity202211,243,465Plasma treatment method to enhance surface adhesion for lithography2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2026 |