Inventor
Yurii Victorovitch Sidelnikov
Inventor
Troitsk, RU
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices58%
B82YSpecific uses or applications of nanostructures17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
H05GX-ray technique8%
PatentTitleYear
9,307,624'Lithographic apparatus'20168,294,128'Apparatus with plasma radiation source and method of forming a beam of radiation'20128,018,574'Lithographic apparatus, radiation system and device manufacturing method'20117,928,412'Lithographic apparatus, and device manufacturing method'20117,825,390'Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus'20107,629,594'Lithographic apparatus, and device manufacturing method'20097,034,308'Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2016Patents assigned to ASML NETHERLANDS BV (7)· patent assignee history
2006Based in Moscow, RU· patent location history
2009–2016Based in Troitsk, RU· patent location history
2012–2016Patents assigned to BANINE VADIM YEVGENYEVICH (2)· patent assignee history
2012–2016Patents assigned to IVANOV VLADIMIR VITALEVICH (2)· patent assignee history
2012–2016Patents assigned to KOSHELEV KONSTANTIN NIKOLAEVICH (2)· patent assignee history
2012–2016Patents assigned to KRIVTSUN VLADIMIR MIHAILOVITCH (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 7 | 2006–2016 |
| BANINE VADIM YEVGENYEVICH | 2 | 2012–2016 |
| IVANOV VLADIMIR VITALEVICH | 2 | 2012–2016 |
| KOSHELEV KONSTANTIN NIKOLAEVICH | 2 | 2012–2016 |
| KRIVTSUN VLADIMIR MIHAILOVITCH | 2 | 2012–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Troitsk, RU | 6 | 2009–2016 |
| Moscow, RU | 1 | 2006 |