Inventor
Alois Goller
Inventor
Villach, AT
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
H01LSemiconductor devices29%
F17DPipe-line systems14%
Y10TTechnical subjects covered by former us classification14%
PatentTitleYear
10,861,719Method and apparatus for processing wafer-shaped articles202010,720,343Method and apparatus for processing wafer-shaped articles202010,679,871Method and apparatus for processing wafer-shaped articles20209,146,007'Apparatus for liquid treatment of work pieces and flow control system for use in same'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2020Patents assigned to LAM RES AG (3)· patent assignee history
2015–2020Based in Villach, AT· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES AG | 3 | 2015–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Villach, AT | 4 | 2015–2020 |