LexDanaLexDanabeta
Inventor

Kent R. Becker

Inventor
Fairfax, VT, US

Overview

2→
Patents
2001
Patent span
Performing operations
Primary field (CPC B)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing50%
B08BCleaning in general25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
6,273,797'In-situ automated CMP wedge conditioner'20016,186,873'Wafer edge cleaning'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to IBM (2)· patent assignee history
2001Based in Fairfax, VT, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
IBM22001
Locations
LocationPatentsSpan
Fairfax, VT, US22001