Inventor
KATSUYUKI KOIZUMI
Inventor
JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H02NElectric machines not otherwise provided for10%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling5%
H05BElectric heating5%
PatentTitleYear
12,354,890Stage and plasma processing apparatus202512,293,903Substrate support and plasma processing apparatus202511,935,729Substrate support and plasma processing apparatus202411,837,480Temperature controlling apparatus, temperature controlling method, and placing table202311,791,177Placing table including heat exchange medium path and substrate processing apparatus thereof202311,784,066Stage and plasma processing apparatus202311,756,806Heater power feeding mechanism202311,735,392Plasma processing apparatus202311,705,347Thermal regulator, substrate processing apparatus, and method of controlling temperature of stage202311,694,881Stage and plasma processing apparatus202311,515,194Substrate processing apparatus, substrate processing system, and substrate transporting method202211,373,884Placing table and plasma treatment apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (12)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 12 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 12 | 2022–2025 |