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Inventor

Minoru Onda

Inventor
Kawasaki, JP

Overview

3→
Patents
2001–2016
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
9,411,247'Exposure apparatus, exposure method, and method for producing device'20166,522,390'Projection exposure method and apparatus'20036,235,438'Projection exposure method and apparatus'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2016Patents assigned to NIKON CORP (3)· patent assignee history
2001–2003Based in Kawasaki, JP· patent location history
2016Based in Ageo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP32001–2016
Locations
LocationPatentsSpan
Kawasaki, JP22001–2003
Ageo, JP12016