Inventor
Shinro Ohta
Inventor
Tokyo, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
G01BMeasuring length, thickness or similar linear dimensions14%
B24DTools for grinding, buffing or sharpening10%
G01NInvestigating or analysing materials by determining their chemical or physical properties10%
G05BControl or regulating systems in general10%
B23HWorking of metal by the action of a high concentration of electric current on a workpiece using an electrode which takes the place of a tool5%
H01LSemiconductor devices5%
PatentTitleYear
10,207,390Processing end point detection method, polishing method, and polishing apparatus20198,696,924'Polishing apparatus and polishing method'20148,554,356'Processing end point detection method, polishing method, and polishing apparatus'20137,101,257'Substrate polishing apparatus'20067,081,044'Polishing apparatus and polishing pad'20067,021,991'Polishing apparatus'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2019Patents assigned to EBARA CORP (5)· patent assignee history
2006–2019Based in Tokyo, JP· patent location history
2013–2014Patents assigned to OHTA SHINRO (2)· patent assignee history
2013–2014Patents assigned to SHIGETA ATSUSHI (2)· patent assignee history
2013–2014Patents assigned to TOSHIBA KK (2)· patent assignee history
2013Patents assigned to KOBAYASHI YOICHI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 5 | 2006–2019 |
| OHTA SHINROself | 2 | 2013–2014 |
| SHIGETA ATSUSHI | 2 | 2013–2014 |
| TOSHIBA KK | 2 | 2013–2014 |
| KOBAYASHI YOICHI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 6 | 2006–2019 |