Inventor
HUI-CHUN LEE
Inventor
TW
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices21%
B01DSeparation6%
B03CMagnetic or electrostatic separation of solid materials from solid materials or fluids4%
B08BCleaning in general4%
B05BSpraying apparatus2%
F24FAir-conditioning2%
G11BInformation storage based on relative movement between record carrier and transducer2%
H10DInorganic electric semiconductor devices2%
PatentTitleYear
12,594,571Method and apparatus for reducing solvent consumption202612,557,607Photoresist and formation method thereof202612,532,546Methods for reduction of photoresist defect202612,512,319Photoresist and formation method thereof202512,506,004Method of manufacturing a semiconductor device and semiconductor device manufacturing tool202512,362,179Method and apparatus for coating photo resist over a substrate202512,145,087Device for applying magnetic field to a filter for reducing metallic contaminants202412,087,580Method of manufacturing semiconductor devices202412,025,919Method of storing photoresist coated substrates and semiconductor substrate container arrangement202411,955,335Method and apparatus for coating photo resist over a substrate202411,908,681Semiconductor fabricating system having hybrid brush assembly202411,798,800Method and apparatus for solvent recycling202311,666,838Device for applying magnetic field to a filter for reducing metallic contaminants202311,545,361Method and apparatus for coating photo resist over a substrate202311,417,512Method for cleaning semiconductor wafer backside surface by hybrid brush assembly2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (14)· patent assignee history
2022–2026Based in TW· patent location history
2026Patents assigned to TAIWAN SEMICONDUCTOR MFG COMPANY LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 14 | 2022–2026 |
| TAIWAN SEMICONDUCTOR MFG COMPANY LTD | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 15 | 2022–2026 |