Inventor
Helene Prigge
Inventor
Unterschleissheim, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
B24BMachines, devices, or processes for grinding or polishing14%
C01BNon-metallic elements14%
B01DSeparation7%
C30BSingle-crystal growth7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
Y10TTechnical subjects covered by former us classification7%
PatentTitleYear
5,167,667'Process for treating polishing cloths used for semiconductor wafers'19925,164,323'Process for the surface treatment of semiconductor slices'19925,110,428'Process and apparatus for double-sided chemomechanical polishing of semiconductor wafers and semiconductor wafers obtainable thereby'19925,051,117'Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds'19914,973,563'Process for preserving the surface of silicon wafers'19904,971,654'Process and apparatus for etching semiconductor surfaces'19904,968,381'Method of haze-free polishing for semiconductor wafers'19904,892,568'Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990–1992Patents assigned to WACKER CHEMITRONIC (8)· patent assignee history
1990–1991Based in Unterschleissheim, DE· patent location history
1992Based in Chatswood, AU· patent location history
1992Based in Chatswoof, AU· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| WACKER CHEMITRONIC | 8 | 1990–1992 |
Locations
| Location | Patents | Span |
|---|---|---|
| Unterschleissheim, DE | 5 | 1990–1991 |
| Chatswood, AU | 2 | 1992 |
| Chatswoof, AU | 1 | 1992 |