Inventor
Amir Azordegan
Inventor
Santa Clara, CA, US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps32%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
G01NInvestigating or analysing materials by determining their chemical or physical properties12%
G06FElectric digital data processing9%
G06TImage data processing or generation, in general9%
G06NComputing arrangements based on specific computational models6%
Y02PClimate change mitigation technologies in the production or processing of goods6%
G01BMeasuring length, thickness or similar linear dimensions3%
G01RMeasuring electric variables3%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
PatentTitleYear
10,769,761Generating high resolution images from low resolution images for semiconductor applications202010,545,412Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control202010,276,346Particle beam inspector with independently-controllable beams20199,513,565'Using wafer geometry to improve scanner correction effectiveness for overlay control'20169,373,165'Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance'20169,087,176'Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control'20159,029,810'Using wafer geometry to improve scanner correction effectiveness for overlay control'20157,423,269'Automated feature analysis with off-axis tilting'20087,405,402'Method and apparatus for aberration-insensitive electron beam imaging'20087,276,690'Method and system for e-beam scanning'20077,173,243'Non-feature-dependent focusing'20077,015,468'Methods of stabilizing measurement of ArF resist in CD-SEM'20066,995,369'Scanning electron beam apparatus and methods of processing data from same'20066,815,675'Method and system for e-beam scanning'20046,770,879'Motion picture output from electron microscope'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2008Patents assigned to KLA TENCOR TECH CORP (8)· patent assignee history
2004–2020Based in Santa Clara, CA, US· patent location history
2015–2020Patents assigned to KLA TENCOR CORP (7)· patent assignee history
2015Based in Mipitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 8 | 2004–2008 |
| KLA TENCOR CORP | 7 | 2015–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 14 | 2004–2020 |
| Mipitas, California, US | 1 | 2015 |