Inventor
PETRUS ADRIANUS WILLEMS
Inventor
NL
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H05GX-ray technique50%
PatentTitleYear
11,963,285Target material control in an EUV light source2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2024Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 1 | 2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 1 | 2024 |