Inventor
Akella V. S. Satya
Inventor
Milpitas, CA, US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
G01RMeasuring electric variables23%
G01NInvestigating or analysing materials by determining their chemical or physical properties18%
H01JElectric discharge tubes or discharge lamps18%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
G06FElectric digital data processing3%
PatentTitleYear
7,655,482'Chemical mechanical polishing test structures and methods for inspecting the same'20107,656,170'Multiple directional scans of test structures on semiconductor integrated circuits'20107,179,661'Chemical mechanical polishing test structures and methods for inspecting the same'20077,012,439'Multiple directional scans of test structures on semiconductor integrated circuits'20066,948,141'Apparatus and methods for determining critical area of semiconductor design data'20056,921,672'Test structures and methods for inspection of semiconductor integrated circuits'20056,918,101'Apparatus and methods for determining critical area of semiconductor design data'20056,867,606'Multiple directional scans of test structures on semiconductor integrated circuits'20056,813,572'Apparatus and methods for managing reliability of semiconductor devices'20046,771,806'Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices'20046,751,519'Methods and systems for predicting IC chip yield'20046,636,064'Dual probe test structures for semiconductor integrated circuits'20036,633,174'Stepper type test structures and methods for inspection of semiconductor integrated circuits'20036,576,923'Inspectable buried test structures and methods for inspecting the same'20036,566,885'Multiple directional scans of test structures on semiconductor integrated circuits'20036,528,818'Test structures and methods for inspection of semiconductor integrated circuits'20036,524,873'Continuous movement scans of test structures on semiconductor integrated circuits'20036,509,197'Inspectable buried test structures and methods for inspecting the same'20036,445,199'Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures'20026,433,561'Methods and apparatus for optimizing semiconductor inspection tools'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2003Patents assigned to KLA TENCOR CORP (4)· patent assignee history
2002–2010Based in Milpitas, CA, US· patent location history
2003–2010Patents assigned to KLA TENCOR (8)· patent assignee history
2004–2010Patents assigned to KLA TENCOR TECH CORP (7)· patent assignee history
2005Patents assigned to KLA TENCOR TECHNOLOGIES INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR | 8 | 2003–2010 |
| KLA TENCOR TECH CORP | 7 | 2004–2010 |
| KLA TENCOR CORP | 4 | 2002–2003 |
| KLA TENCOR TECHNOLOGIES INC | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Milpitas, California, US | 20 | 2002–2010 |