Inventor
Mitsuru Hiura
Inventor
Utsunomiya, JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices31%
B29CShaping or joining of plastics21%
B82YSpecific uses or applications of nanostructures21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
G02BOptical elements, systems or apparatus3%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them3%
H01JElectric discharge tubes or discharge lamps3%
H05GX-ray technique3%
PatentTitleYear
10,073,339Imprint apparatus20189,910,351'Imprint apparatus and article manufacturing method'20189,851,634Imprint apparatus20179,616,613'Imprint apparatus including alignment and overlay measurement'20179,541,825'Imprint apparatus and article manufacturing method'20179,442,370'Imprinting method, imprinting apparatus, and device manufacturing method'20167,295,285'Exposure apparatus and device manufacturing method'20077,274,435'Exposure apparatus and device fabrication method using the same'20076,891,175'Exposure apparatus and device manufacturing method using the same'20055,500,528'Scanning electron microscope'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Patents assigned to NIKON CORP (1)· patent assignee history
1996Based in Kanagawa, JP· patent location history
2005–2018Patents assigned to CANON KK (9)· patent assignee history
2005–2007Based in Tochigi, JP· patent location history
2007–2018Based in Utsunomiya, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 9 | 2005–2018 |
| NIKON CORP | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 7 | 2007–2018 |
| Tochigi, JP | 2 | 2005–2007 |
| Kanagawa, JP | 1 | 1996 |