Inventor
Giorgio G. Via
Inventor
McLean, VA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices21%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1021%
B82YSpecific uses or applications of nanostructures7%
H01JElectric discharge tubes or discharge lamps7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
Y10TTechnical subjects covered by former us classification7%
PatentTitleYear
5,258,264'Process of forming a dual overhang collimated lift-off stencil with subsequent metal deposition'19935,087,537'Lithography imaging tool and related photolithographic processes'19925,024,896'Collimated metal deposition'19914,745,045'Method for improving resolution in microelectronic circuits using photoresist overlayer by using thermally processed polyimide underlayer formed from positive photoresist and polyamic acid'19884,567,132'Multi-level resist image reversal lithography process'1986Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–1993Patents assigned to IBM (5)· patent assignee history
1986–1993Based in McLean, VA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 5 | 1986–1993 |
Locations
| Location | Patents | Span |
|---|---|---|
| McLean, Virginia, US | 5 | 1986–1993 |