Inventor
Simon De Groot
Inventor
Eindhoven, NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices83%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them17%
PatentTitleYear
7,889,316'Method for patterning a radiation beam, patterning device for patterning a radiation beam'20117,626,684'Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus'20097,403,264'Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus'20087,262,831'Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus'20076,563,564'Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003Patents assigned to ASM LITHOGRAPHY BV (1)· patent assignee history
2003–2011Based in Eindhoven, NL· patent location history
2007–2011Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2007–2011 |
| ASM LITHOGRAPHY BV | 1 | 2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 5 | 2003–2011 |