Inventor
Evgenia KURGANOVA
Inventor
NL
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices48%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material9%
H01LSemiconductor devices9%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry4%
C01BNon-metallic elements4%
H01JElectric discharge tubes or discharge lamps4%
PatentTitleYear
12,399,428Method and apparatus for forming a patterned layer of material202512,325,911Method and apparatus for forming a patterned layer of material202512,117,726Pellicle and pellicle assembly202412,072,620Method of manufacturing a membrane assembly202411,971,654Metal-silicide-nitridation for stress reduction202411,947,256Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing202411,754,918Pellicle and pellicle assembly202311,686,997Metal-silicide-nitridation for stress reduction202311,467,486Graphene pellicle lithographic apparatus202211,287,737Metal-silicide-nitridation for stress reduction202211,231,646Pellicle and pellicle assembly2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASML NETHERLANDS BV (11)· patent assignee history
2022–2025Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 11 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 11 | 2022–2025 |