Inventor
Farro Kaveh
Inventor
Palo Alto, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
G05DSystems for controlling or regulating non-electric variables17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
Y10TTechnical subjects covered by former us classification17%
G05BControl or regulating systems in general11%
H01JElectric discharge tubes or discharge lamps11%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
PatentTitleYear
8,744,624'Substrate alignment system'20146,622,286'Integrated electronic hardware for wafer processing control and diagnostic'20036,526,355'Integrated full wavelength spectrometer for wafer processing'20036,364,762'Wafer atmospheric transport module having a controlled mini-environment'20026,142,163'Method and apparatus for pressure control in vacuum processors'20005,961,724'Techniques for reducing particulate contamination on a substrate during processing'19995,803,107'Method and apparatus for pressure control in vacuum processors'19985,758,680'Method and apparatus for pressure control in vacuum processors'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2003Patents assigned to LAM RES CORP (7)· patent assignee history
1998Based in Mountain View, CA, US· patent location history
1999–2014Based in Palo Alto, CA, US· patent location history
2014Patents assigned to AALUND MARTIN P (1)· patent assignee history
2014Patents assigned to KAVEH FARRO (1)· patent assignee history
2014Patents assigned to KLA TENCOR CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 1998–2003 |
| AALUND MARTIN P | 1 | 2014 |
| KAVEH FARROself | 1 | 2014 |
| KLA TENCOR CORP | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Palo Alto, California, US | 6 | 1999–2014 |
| Mountain View, California, US | 2 | 1998 |