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Inventor

ERI FUJITA

Inventor
JP

Overview

1→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,260,436Substrate processing apparatus and substrate processing method2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to SCREEN HOLDINGS CO LTD (1)· patent assignee history
2022Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SCREEN HOLDINGS CO LTD12022
Locations
LocationPatentsSpan
JP12022