Inventor
Arjan Johannes Anton Beukman
Inventor
NL
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
G02BOptical elements, systems or apparatus19%
G01BMeasuring length, thickness or similar linear dimensions13%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
12,585,198Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method202612,393,046Metrology systems, coherence scrambler illumination sources and methods thereof202512,326,669Illumination apparatus and associated metrology and lithographic apparatuses202512,298,257Monolithic particle inspection device202512,287,591Lithographic apparatus, metrology systems, and methods thereof202511,906,906Metrology method and associated metrology and lithographic apparatuses202411,428,925Position metrology apparatus and associated optical elements2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to ASML NETHERLANDS BV (7)· patent assignee history
2022–2026Based in NL· patent location history
2025–2026Patents assigned to ASML HOLDING NV (4)· patent assignee history
2025Patents assigned to ASML NETHERLANDS B V & ASML HOLDING N V (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 7 | 2022–2026 |
| ASML HOLDING NV | 4 | 2025–2026 |
| ASML NETHERLANDS B V & ASML HOLDING N V | 1 | 2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 7 | 2022–2026 |