Inventor
Alan D. Rose
Inventor
Wylie, TX, US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests18%
Y10TTechnical subjects covered by former us classification16%
H01LSemiconductor devices14%
B05BSpraying apparatus11%
H01JElectric discharge tubes or discharge lamps7%
C23CCoating metallic material2%
PatentTitleYear
9,666,456'Method and apparatus for treating a workpiece with arrays of nozzles'20179,564,378'Detection of lost wafer from spinning chuck'20179,039,840'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20158,978,675'Method and apparatus for treating a workpiece with arrays of nozzles'20158,967,167'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20158,899,248'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20148,684,015'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20148,668,778'Method of removing liquid from a barrier structure'20148,656,936'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20148,544,483'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20138,387,635'Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids'20138,235,062'Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation'20127,913,706'Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses'20117,681,581'Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids'20105,423,942'Method and apparatus for reducing etching erosion in a plasma containment tube'19954,820,371'Apertured ring for exhausting plasma reactor gases'19894,792,378'Gas dispersion disk for use in plasma enhanced chemical vapor deposition reactor'1988Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1988–2017Based in Wylie, TX, US· patent location history
2010–2015Patents assigned to FSI INT INC (6)· patent assignee history
2012–2014Patents assigned to COLLINS JIMMY D (6)· patent assignee history
2012–2014Patents assigned to ROSE ALAN D (6)· patent assignee history
2013–2017Patents assigned to TEL FSI INC (11)· patent assignee history
2013–2014Patents assigned to COOPER SAMUEL A (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEL FSI INC | 11 | 2013–2017 |
| COLLINS JIMMY D | 6 | 2012–2014 |
| FSI INT INC | 6 | 2010–2015 |
| ROSE ALAN Dself | 6 | 2012–2014 |
| COOPER SAMUEL A | 3 | 2013–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Wylie, Texas, US | 17 | 1988–2017 |