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Inventor

Wen Zen Chiu

Inventor
Feng Yuan, TW

Overview

1→
Patents
2003
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G05Bprimary
G05BControl or regulating systems in general100%
PatentTitleYear
6,577,926'Method of detecting and controlling in-situ faults in rapid thermal processing systems'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2003Based in Feng Yuan, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG12003
Locations
LocationPatentsSpan
Feng Yuan, TW12003