Inventor
Robert Brennan Milligan
Inventor
Gold Canyon, AZ, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material22%
H01LSemiconductor devices16%
H10DInorganic electric semiconductor devices12%
H01JElectric discharge tubes or discharge lamps10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
Y10TTechnical subjects covered by former us classification6%
LOC232%
PatentTitleYear
10,865,475Deposition of metal borides and silicides202010,211,308NbMC layers201910,087,522Deposition of metal borides201810,083,836Formation of boron-doped titanium metal films with high work function201810,023,960Process gas management for an inductively-coupled plasma deposition reactor20189,605,342'Process gas management for an inductively-coupled plasma deposition reactor'20179,466,574'Plasma-enhanced atomic layer deposition of conductive material over dielectric layers'20169,412,564'Semiconductor reaction chamber with plasma capabilities'20169,029,253'Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same'20159,021,985'Process gas management for an inductively-coupled plasma deposition reactor'20159,018,111'Semiconductor reaction chamber with plasma capabilities'2015D0698904'Vacuum flange ring'20148,557,702'Plasma-enhanced atomic layers deposition of conductive material over dielectric layers'20137,713,874'Periodic plasma annealing in an ALD-type process'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2016Patents assigned to ASM INC (3)· patent assignee history
2010–2018Based in Gold Canyon, AZ, US· patent location history
2014–2020Patents assigned to ASM IP HOLDING BV (10)· patent assignee history
2014–2015Patents assigned to MILLIGAN ROBERT BRENNAN (2)· patent assignee history
2015–2018Patents assigned to ASM IP HOLDINGS B V (2)· patent assignee history
2015Patents assigned to ALOKOZAI FRED (1)· patent assignee history
2018–2020Based in Phoenix, AZ, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM IP HOLDING BV | 10 | 2014–2020 |
| ASM INC | 3 | 2010–2016 |
| ASM IP HOLDINGS B V | 2 | 2015–2018 |
| MILLIGAN ROBERT BRENNANself | 2 | 2014–2015 |
| ALOKOZAI FRED | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Gold Canyon, AZ, US | 10 | 2010–2018 |
| Phoenix, AZ, US | 4 | 2018–2020 |