Inventor
FUMIO IWAMOTO
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
G01NInvestigating or analysing materials by determining their chemical or physical properties10%
PatentTitleYear
12,332,575Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202512,185,449EUV light generation apparatus, electronic device manufacturing method, and inspection method202411,659,646Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202311,395,398Extreme ultraviolet light generation apparatus and electronic device manufacturing method202211,360,391Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to GIGAPHOTON INC (5)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GIGAPHOTON INC | 5 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2025 |