Inventor
Mark Taskar
Inventor
San Mateo, CA, US
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
Y10Tprimary
Y10TTechnical subjects covered by former us classification23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
F16KValves12%
H01JElectric discharge tubes or discharge lamps11%
C23CCoating metallic material9%
F17DPipe-line systems6%
G05DSystems for controlling or regulating non-electric variables6%
B01FMixing, e.g. dissolving, emulsifying or dispersing5%
H01LSemiconductor devices5%
B08BCleaning in general2%
PatentTitleYear
10,943,769Gas distributor and flow verifier202110,431,431Gas supply delivery arrangement including a gas splitter for tunable gas flow control201910,128,087Configuration independent gas delivery system201810,022,689Fluid mixing hub for semiconductor processing tool201810,002,747Methods and apparatus for supplying process gas in a plasma processing system20189,721,763'Systems and methods for providing gases to a process chamber'20179,704,761'Corrosion sensor retainer assembly apparatus and method for detecting corrosion'20179,335,768'Cluster mass flow devices and multi-line mass flow devices incorporating the same'20169,175,808'System and method for decreasing scrubber exhaust from gas delivery panels'20159,091,397'Shared gas panels in plasma processing chambers employing multi-zone gas feeds'20159,090,972'Gas supply systems for substrate processing chambers and methods therefor'20158,851,113'Shared gas panels in plasma processing systems'20148,794,267'Gas transport delay resolution for short etch recipes'20148,720,478'Optimized activation prevention mechanism for a gas delivery system'20148,322,380'Universal fluid flow adaptor'20128,202,393'Alternate gas delivery and evacuation system for plasma processing apparatuses'20128,122,910'Flexible manifold for integrated gas system gas panels'20128,104,503'Optimized activation prevention mechanism for a gas delivery system and methods therefor'20127,806,143'Flexible manifold for integrated gas system gas panels'20107,784,496'Triple valve inlet assembly'20107,628,168'Optimized activation prevention assembly for a gas delivery system and methods therefor'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2021Patents assigned to LAM RES CORP (20)· patent assignee history
2009–2021Based in San Mateo, CA, US· patent location history
2012–2018Patents assigned to TASKAR MARK (10)· patent assignee history
2014–2018Patents assigned to SHAREEF IQBAL (5)· patent assignee history
2015–2018Patents assigned to SPYROPOULOS EVANGELOS (2)· patent assignee history
2015Patents assigned to AGARWAL PIYUSH (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 20 | 2009–2021 |
| TASKAR MARKself | 10 | 2012–2018 |
| SHAREEF IQBAL | 5 | 2014–2018 |
| SPYROPOULOS EVANGELOS | 2 | 2015–2018 |
| AGARWAL PIYUSH | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Mateo, California, US | 21 | 2009–2021 |