Inventor
Alexander Matyushkin
Inventor
US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps26%
H01LSemiconductor devices26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling11%
H02NElectric machines not otherwise provided for11%
PatentTitleYear
12,387,909Low frequency RF generator and associated electrostatic chuck202512,381,105Coolant channel with internal fins for substrate processing pedestals202512,340,989Electrostatic edge ring mounting system for substrate processing202512,237,201Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns202511,942,351Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns202411,664,262Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns202311,651,991Electrostatic Chuck design for cooling-gas light-up prevention2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to LAM RES CORP (7)· patent assignee history
2023–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 7 | 2023–2025 |