Inventor
Thomas Wirnsberger
Inventor
Seeboden, AT
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%
H01LSemiconductor devices26%
Y10TTechnical subjects covered by former us classification17%
B08BCleaning in general11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
B23BTurning3%
F16DCouplings for transmitting rotation3%
PatentTitleYear
10,490,426Method and apparatus for processing wafer-shaped articles201910,269,615Apparatus for treating surfaces of wafer-shaped articles201910,056,287Apparatus for treating surfaces of wafer-shaped articles20189,887,120'Apparatus for treating surfaces of wafer-shaped articles'20189,653,328'Method and apparatus for surface treatment using inorganic acid and ozone'20179,633,890'Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device'20179,418,883'Device for holding wafer shaped articles'20169,044,794'Ultrasonic cleaning fluid, method and apparatus'20158,833,380'Device for treating disc-like articles'20148,709,165'Method and apparatus for surface treatment using inorganic acid and ozone'20148,646,767'Device for holding wafer shaped articles'20148,490,634'Device for treating disc-like articles'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2019Patents assigned to LAM RES AG (12)· patent assignee history
2013–2019Patents assigned to WIRNSBERGER THOMAS (8)· patent assignee history
2013–2019Patents assigned to OBWEGER RAINER (7)· patent assignee history
2013–2017Patents assigned to KUMNIG FRANZ (4)· patent assignee history
2013–2019Based in Seeboden, AT· patent location history
2017–2019Patents assigned to GLEISSNER ANDREAS (2)· patent assignee history
2019Based in Villach, AT· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES AG | 12 | 2013–2019 |
| WIRNSBERGER THOMASself | 8 | 2013–2019 |
| OBWEGER RAINER | 7 | 2013–2019 |
| KUMNIG FRANZ | 4 | 2013–2017 |
| GLEISSNER ANDREAS | 2 | 2017–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seeboden, AT | 11 | 2013–2019 |
| Villach, AT | 1 | 2019 |