Inventor
In-Sung Kim
Inventor
Suwon-si, KR
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices37%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B82YSpecific uses or applications of nanostructures10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
B05BSpraying apparatus2%
B29CShaping or joining of plastics2%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light2%
G01VGeophysics2%
G21KHandling of particles or ionising radiation not otherwise provided for2%
PatentTitleYear
9,867,267'Extreme ultraviolet light source device'20189,791,788'Method of manufacturing a semiconductor device'20179,658,522'Reflective extreme ultraviolet mask'20179,645,484'Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same'20179,116,438'Method of correcting flare and method of preparing extreme ultra violet mask'20158,599,360'Reflective reticle chuck, reflective illumination system including the same, method of controlling flatness of reflective reticle using the chuck, and method of manufacturing semiconductor device using the chuck'20138,287,792'Methods of forming fine patterns using a nanoimprint lithography'20128,158,958'Flare evaluation methods'20128,119,309'Reflective photomask and method of fabricating, reflective illumination system and method of process using the same'20128,006,202'Systems and methods for UV lithography'20117,635,547'Stencil mask having main and auxiliary strut and method of forming the same'20097,475,383'Method of fabricating photo mask'20097,473,497'Phase shifting mask for manufacturing semiconductor device and method of fabricating the same'20097,384,711'Stencil mask having main and auxiliary strut and method of forming the same'20087,361,433'Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same'20087,300,746'Photomask for forming small contact hole array and methods of fabricating and using the same'20077,288,422'Photonic integrated device using reverse-mesa structure and method for fabricating the same'20077,022,438'Photomask for forming small contact hole array and methods of fabricating and using the same'20066,893,779'Phase shifting mask for manufacturing semiconductor device and method of fabricating the same'20056,716,746'Semiconductor device having self-aligned contact and method of fabricating the same'20046,492,701'Semiconductor device having anti-reflective cap and spacer, method of manufacturing the same, and method of manufacturing photoresist pattern using the same'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2018Patents assigned to SAMSUNG ELECTRONICS CO LTD (21)· patent assignee history
2002–2009Based in Seoul, KR· patent location history
2006–2015Based in Suwon-si, KR· patent location history
2008–2018Based in Seongnam-si, KR· patent location history
2012–2018Patents assigned to KIM IN-SUNG (7)· patent assignee history
2012–2013Patents assigned to PARK CHANG-MIN (3)· patent assignee history
2012–2017Patents assigned to KIM SEONG-SUE (2)· patent assignee history
2012Patents assigned to LEE JEONG-HOON (2)· patent assignee history
2017Based in Yongin-si, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 21 | 2002–2018 |
| KIM IN-SUNGself | 7 | 2012–2018 |
| PARK CHANG-MIN | 3 | 2012–2013 |
| KIM SEONG-SUE | 2 | 2012–2017 |
| LEE JEONG-HOON | 2 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Suwon-si, KR | 11 | 2006–2015 |
| Seongnam-si, KR | 5 | 2008–2018 |
| Seoul, KR | 4 | 2002–2009 |
| Yongin-si, KR | 1 | 2017 |