Inventor
Derrick Shaughnessy
Inventor
San Jose, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
G01BMeasuring length, thickness or similar linear dimensions15%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
F21VFunctional features or details of lighting devices or systems thereof5%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G02BOptical elements, systems or apparatus5%
H01JElectric discharge tubes or discharge lamps5%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light5%
G06NComputing arrangements based on specific computational models2%
PatentTitleYear
10,969,328Optical metrology tool equipped with modulated illumination sources202110,804,167Methods and systems for co-located metrology202010,215,688Optical metrology tool equipped with modulated illumination sources201910,203,247Systems for providing illumination in optical metrology201910,006,865Confined illumination for small spot size metrology20189,719,932'Confined illumination for small spot size metrology'20179,512,985'Systems for providing illumination in optical metrology'20169,400,246'Optical metrology tool equipped with modulated illumination sources'20168,860,937'Metrology systems and methods for high aspect ratio and large lateral dimension structures'20148,804,106'System and method for nondestructively measuring concentration and thickness of doped semiconductor layers'20148,111,399'System and method for performing photothermal measurements and relaxation compensation'20127,045,786'Method of photocarrier radiometry of semiconductors'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2014Patents assigned to SHAUGHNESSY DERRICK (3)· patent assignee history
2006Patents assigned to BATISTA JERIAS ALVES (1)· patent assignee history
2006Based in Toronto, CA· patent location history
2012–2021Patents assigned to KLA TENCOR CORP (11)· patent assignee history
2012–2021Based in San Jose, CA, US· patent location history
2014Patents assigned to AN JIN (1)· patent assignee history
2014Patents assigned to CHOUAIB HOUSSAM (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 11 | 2012–2021 |
| SHAUGHNESSY DERRICKself | 3 | 2006–2014 |
| AN JIN | 1 | 2014 |
| BATISTA JERIAS ALVES | 1 | 2006 |
| CHOUAIB HOUSSAM | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 11 | 2012–2021 |
| Toronto, CA | 1 | 2006 |