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Inventor

Vien Quach

Inventor
San Jose, CA, US

Overview

2→
Patents
2004–2006
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G05Dprimary
G05DSystems for controlling or regulating non-electric variables100%
PatentTitleYear
7,054,719'System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system'20066,732,017'System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system'2004

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2004–2006Patents assigned to LAM RES CORP (2)· patent assignee history
2004–2006Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP22004–2006
Locations
LocationPatentsSpan
San Jose, California, US22004–2006