Inventor
SUNIL SRINIVASAN
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01JElectric discharge tubes or discharge lamps22%
H01LSemiconductor devices22%
C23CCoating metallic material13%
B08BCleaning in general6%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems6%
H05HPlasma technique3%
PatentTitleYear
12,456,611Systems and methods for controlling a voltage waveform at a substrate during plasma processing202512,255,055Integrated cleaning process for substrate etching202512,237,149Reducing aspect ratio dependent etch with direct current bias pulsing202512,094,752Wafer edge ring lifting solution202411,996,294Cryogenic atomic layer etch with noble gases202411,521,849In-situ deposition process202211,521,838Integrated cleaning process for substrate etching202211,515,166Cryogenic atomic layer etch with noble gases202211,393,710Wafer edge ring lifting solution202211,284,500Method of controlling ion energy distribution using a pulse generator2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (10)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 10 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2025 |