Inventor
Waikit Fung
Inventor
Saratoga, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material20%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
H01JElectric discharge tubes or discharge lamps10%
H01LSemiconductor devices10%
H05HPlasma technique10%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
PatentTitleYear
10,395,944Pulsing RF power in etch process to enhance tungsten gapfill performance20199,978,610Pulsing RF power in etch process to enhance tungsten gapfill performance20187,163,896'Biased H2 etch process in deposition-etch-deposition gap fill'20077,078,312'Method for controlling etch process repeatability'20067,064,087'Phosphorous-doped silicon dioxide process to customize contact etch profiles'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2007Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2006–2007Based in Cupertino, CA, US· patent location history
2006Based in Mountain View, CA, US· patent location history
2018–2019Patents assigned to LAM RES CORP (2)· patent assignee history
2018–2019Based in Saratoga, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 3 | 2006–2007 |
| LAM RES CORP | 2 | 2018–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Saratoga, California, US | 2 | 2018–2019 |
| Cupertino, California, US | 2 | 2006–2007 |
| Mountain View, California, US | 1 | 2006 |