Inventor
Go Miya
Inventor
Hachioji, JP
Overview
Patents· 19 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps44%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices9%
C23CCoating metallic material5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
H05HPlasma technique5%
PatentTitleYear
10,872,742Charged particle beam device202010,128,141Plasma processing apparatus and plasma processing method20189,799,486'Charged particle beam apparatus for measuring surface potential of a sample'20179,704,731'Plasma processing apparatus and plasma processing method'20179,401,297'Electrostatic chuck mechanism and charged particle beam apparatus'20168,921,781'Measurement or inspecting apparatus'20148,653,455'Charged particle beam device and evaluation method using the charged particle beam device'20148,519,332'Semiconductor inspecting apparatus'20138,232,522'Semiconductor inspecting apparatus'20128,231,759'Plasma processing apparatus'20128,083,889'Apparatus and method for plasma etching'20117,887,669'Vacuum processing apparatus'20117,744,721'Plasma processing apparatus'20107,713,756'Apparatus and method for plasma etching'20107,396,771'Plasma etching apparatus and plasma etching method'20087,147,747'Plasma processing apparatus and plasma processing method'20067,147,748'Plasma processing method'20066,899,766'Diagnosis method for semiconductor processing apparatus'20056,866,744'Semiconductor processing apparatus and a diagnosis method therefor'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2020Patents assigned to HITACHI HIGH TECH CORP (19)· patent assignee history
2005Based in Chiyoda-ku, JP· patent location history
2006–2011Based in Ibaraki, JP· patent location history
2008–2017Based in Hachioji, JP· patent location history
2011–2014Patents assigned to MIYA GO (5)· patent assignee history
2012–2014Patents assigned to KANNO SEIICHIRO (3)· patent assignee history
2012–2014Patents assigned to KITSUNAI HIROYUKI (3)· patent assignee history
2012–2014Patents assigned to MATSUSHIMA MASARU (3)· patent assignee history
2016–2020Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 19 | 2005–2020 |
| MIYA GOself | 5 | 2011–2014 |
| KANNO SEIICHIRO | 3 | 2012–2014 |
| KITSUNAI HIROYUKI | 3 | 2012–2014 |
| MATSUSHIMA MASARU | 3 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hachioji, JP | 9 | 2008–2017 |
| Tokyo, JP | 4 | 2016–2020 |
| Ibaraki, JP | 4 | 2006–2011 |
| Chiyoda-ku, JP | 2 | 2005 |