Inventor
Peter B. Mumola
Inventor
Huntington, CT, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
G01BMeasuring length, thickness or similar linear dimensions14%
B24BMachines, devices, or processes for grinding or polishing7%
G02BOptical elements, systems or apparatus7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
G05BControl or regulating systems in general7%
G21BFusion reactors7%
H01JElectric discharge tubes or discharge lamps7%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light7%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution7%
PatentTitleYear
6,646,779'Strain-isolated stage mirror'20036,074,947'Process for improving uniform thickness of semiconductor substrates using plasma assisted chemical etching'20005,543,919'Apparatus and method for performing high spatial resolution thin film layer thickness metrology'19965,474,647'Wafer flow architecture for production wafer processing'19955,419,803'Method of planarizing microstructures'19955,365,031'Apparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processing'19945,337,150'Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer'19945,292,400'Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching'19945,229,872'Exposure device including an electrically aligned electronic mask for micropatterning'19934,516,062'Actuator'19854,422,046'Axisymmetric spatial/temporal encoder'1983Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1983–1985Patents assigned to PERKIN ELMER CORP (2)· patent assignee history
1983–1996Based in Huntington, CT, US· patent location history
1993–1995Patents assigned to HUGHES AIRCRAFT CO (6)· patent assignee history
1996Patents assigned to INTEGRATED PROCESS EQUIPMENT C (1)· patent assignee history
2000Patents assigned to PLASMA SIL LLC (1)· patent assignee history
2000–2003Based in Trumbull, CT, US· patent location history
2003Patents assigned to ZYGO CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HUGHES AIRCRAFT CO | 6 | 1993–1995 |
| PERKIN ELMER CORP | 2 | 1983–1985 |
| INTEGRATED PROCESS EQUIPMENT C | 1 | 1996 |
| PLASMA SIL LLC | 1 | 2000 |
| ZYGO CORP | 1 | 2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| Huntington, CT, US | 9 | 1983–1996 |
| Trumbull, CT, US | 2 | 2000–2003 |