Inventor
Vinayak Vishwanath Hassan
Inventor
Santa Clara, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material22%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices22%
G02BOptical elements, systems or apparatus8%
G06FElectric digital data processing8%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes8%
G08BSignalling systems, e.g. personal calling systems8%
G21KHandling of particles or ionising radiation not otherwise provided for8%
H01JElectric discharge tubes or discharge lamps8%
H05GX-ray technique3%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
PatentTitleYear
11,069,514Remote capacitively coupled plasma source with improved ion blocker202110,551,732Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor202010,197,907Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor201910,012,908Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof201810,012,897Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor20189,690,016'Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof'20179,612,522'Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor'20179,581,890'Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof'20179,581,889'Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2017–2021Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2017–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 9 | 2017–2021 |