Inventor
Sudhakar Subrahmanyam
Inventor
Sunnyvale, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01JElectric discharge tubes or discharge lamps23%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
PatentTitleYear
6,291,028'Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface'20016,289,843'Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface'20016,223,685'Film to tie up loose fluorine in the chamber after a clean process'20016,121,163'Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface'20006,090,167'Method and apparatus for improving film stability of halogen-doped silicon oxide films'20006,079,426'Method and apparatus for determining the endpoint in a plasma cleaning process'20006,020,035'Film to tie up loose fluorine in the chamber after a clean process'20006,001,728'Method and apparatus for improving film stability of halogen-doped silicon oxide films'19995,827,785'Method for improving film stability of fluorosilicate glass films'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2001Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
1998–2001Based in Sunnyvale, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 1998–2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 9 | 1998–2001 |