Inventor
Glen Gilchrist
Inventor
Danvers, MA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01LSemiconductor devices19%
C23CCoating metallic material8%
C23FNon-mechanical removal of metallic material from surface8%
B05BSpraying apparatus6%
H05HPlasma technique4%
B08BCleaning in general2%
G01MTesting static or dynamic balance of machines or structures2%
H10NElectric solid-state devices not otherwise provided for2%
PatentTitleYear
10,840,132Methods for forming elongated contact hole ends202010,730,082Apparatus and method for differential in situ cleaning202010,699,871System and method for spatially resolved optical metrology of an ion beam202010,633,743System and method for controllable non-volatile metal removal202010,600,616Apparatus and techniques to treat substrates using directional plasma and point of use chemistry202010,535,522Angular control of ion beam for vertical surface treatment202010,193,066Apparatus and techniques for anisotropic substrate etching201910,141,161Angle control for radicals and reactive neutral ion beams201810,062,548Gas injection system for ion beam device201810,004,133Apparatus and techniques to treat substrates using directional plasma and reactive gas201810,000,853System and method for controllable non-volatile metal removal20189,611,552'System and method for controllable non-volatile metal removal'20177,289,863'System and method for electronic diagnostics of a process vacuum environment'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007Patents assigned to BROOKS AUTOMATION INC (1)· patent assignee history
2007–2020Based in Danvers, MA, US· patent location history
2017–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (10)· patent assignee history
2020Patents assigned to APPLIED MATERIALS INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 10 | 2017–2020 |
| APPLIED MATERIALS INC | 2 | 2020 |
| BROOKS AUTOMATION INC | 1 | 2007 |
Locations
| Location | Patents | Span |
|---|---|---|
| Danvers, Massachusetts, US | 13 | 2007–2020 |