Inventor
Lakmal C. Kalutarage
Inventor
San Jose, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01LSemiconductor devices17%
C07CAcyclic or carbocyclic compounds8%
C07FAcyclic, carbocyclic or heterocyclic compounds containing elements other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur, selenium or tellurium8%
C01BNon-metallic elements4%
C22BProduction and refining of metals4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
11,107,674Methods for depositing silicon nitride202110,985,009Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources202110,760,159Methods and apparatus for depositing yttrium-containing films202010,354,861Low temperature molecular layer deposition of SiCON20199,812,318'Low temperature molecular layer deposition of SiCON'20179,758,866'Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films'20179,714,464'Precursors for atomic layer deposition'20178,907,115'Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2017Patents assigned to UNIV WAYNE STATE (3)· patent assignee history
2014–2017Based in Detroit, MI, US· patent location history
2017–2021Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2017–2021Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 5 | 2017–2021 |
| UNIV WAYNE STATE | 3 | 2014–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 5 | 2017–2021 |
| Detroit, MI, US | 3 | 2014–2017 |