Inventor
Victor J. Theriault
Inventor
Beverly, MA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
C23CCoating metallic material10%
H01JElectric discharge tubes or discharge lamps10%
H05HPlasma technique10%
Y10TTechnical subjects covered by former us classification10%
PatentTitleYear
9,807,864'Electrode, accelerator column and ion implantation apparatus including same'20176,530,732'Single substrate load lock with offset cool module and buffer chamber'20036,231,289'Dual plate gas assisted heater module'20016,079,928'Dual plate gas assisted heater module'20005,931,626'Robot mounting de-coupling technique'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2003Patents assigned to BROOKS AUTOMATION INC (4)· patent assignee history
1999–2003Based in Beverly, MA, US· patent location history
2017Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (1)· patent assignee history
2017Based in South Hamilton, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BROOKS AUTOMATION INC | 4 | 1999–2003 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beverly, Massachusetts, US | 4 | 1999–2003 |
| South Hamilton, Massachusetts, US | 1 | 2017 |