Inventor
TAKAYUKI OSANAI
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H05GX-ray technique28%
G21KHandling of particles or ionising radiation not otherwise provided for11%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light11%
G02BOptical elements, systems or apparatus6%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein6%
H01JElectric discharge tubes or discharge lamps6%
PatentTitleYear
12,512,640Laser system, pulse laser light generating method, and electronic device manufacturing method202511,789,374Extreme ultraviolet light generation apparatus and electronic device manufacturing method202311,483,917Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202211,366,394Extreme ultraviolet light generation system and electronic device manufacturing method202211,363,705Extreme ultraviolet light generation apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method202211,350,514Extreme ultraviolet light generation apparatus, and electronic device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to GIGAPHOTON INC (6)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GIGAPHOTON INC | 6 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2022–2025 |