Inventor
William R. Entley
Inventor
Wakefield, MA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps18%
C23CCoating metallic material16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
H01LSemiconductor devices11%
B08BCleaning in general5%
F16KValves5%
G05BControl or regulating systems in general5%
H01BCables5%
H05BElectric heating5%
H05HPlasma technique5%
PatentTitleYear
10,424,460Systems, methods and apparatus for choked flow element extraction201910,395,920Alkyl-alkoxysilacyclic compounds201910,283,325Distributed multi-zone plasma source systems, methods and apparatus201910,249,489Use of silyl bridged alkyl compounds for dense OSG films201910,106,890Compositions and methods using same for deposition of silicon-containing film20189,967,965Distributed, concentric multi-zone plasma source systems, methods and apparatus20189,922,818'Alkyl-alkoxysilacyclic compounds'20189,449,793'Systems, methods and apparatus for choked flow element extraction'20169,155,181'Distributed multi-zone plasma source systems, methods and apparatus'20158,999,104'Systems, methods and apparatus for separate plasma source control'20157,914,603'Particle trap for a plasma source'20117,479,191'Method for endpointing CVD chamber cleans following ultra low-k film treatments'20096,872,323'In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactor'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2009Based in San Jose, CA, US· patent location history
2011–2019Based in Wakefield, MA, US· patent location history
2015–2019Patents assigned to LAM RES CORP (6)· patent assignee history
2015–2019Patents assigned to BENZERROUK SOUHEIL (4)· patent assignee history
2015–2019Patents assigned to COWE ANDREW (4)· patent assignee history
2015–2019Patents assigned to ENTLEY WILLIAM R (4)· patent assignee history
2015–2019Patents assigned to GOTTSCHO RICHARD (4)· patent assignee history
2018–2019Based in Center Valley, PA, US· patent location history
2019Based in Gilbert, AZ, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2015–2019 |
| BENZERROUK SOUHEIL | 4 | 2015–2019 |
| COWE ANDREW | 4 | 2015–2019 |
| ENTLEY WILLIAM Rself | 4 | 2015–2019 |
| GOTTSCHO RICHARD | 4 | 2015–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Wakefield, Massachusetts, US | 7 | 2011–2019 |
| Center Valley, Pennsylvania, US | 3 | 2018–2019 |
| San Jose, California, US | 2 | 2005–2009 |
| Gilbert, AZ, US | 1 | 2019 |