Inventor
Michael R. Rice
Inventor
Pleasanton, CA, US
Overview
Patents· 154 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01JElectric discharge tubes or discharge lamps8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
H01LSemiconductor devices7%
C23CCoating metallic material6%
Y10TTechnical subjects covered by former us classification4%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors4%
G05BControl or regulating systems in general3%
H01FMagnets3%
H04MTelephonic communication3%
PatentTitleYear
10,847,391Semiconductor device manufacturing platform with single and twinned processing chambers202010,847,390Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing202010,787,739Spatial wafer processing with improved temperature uniformity202010,763,134Substrate processing apparatus and methods with factory interface chamber filter purge202010,736,182Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers202010,720,348Dual load lock chamber202010,665,476Substrate processing system, valve assembly, and processing method202010,615,004Distributed electrode array for plasma processing202010,595,415Electronic device manufacturing system202010,563,303Metal oxy-flouride films based on oxidation of metal flourides202010,553,469Sealed substrate carriers and systems and methods for transporting substrates202010,510,515Processing tool with electrically switched electrode assembly201910,443,125Flourination process to create sacrificial oxy-flouride layer201910,443,126Zone-controlled rare-earth oxide ALD and CVD coatings201910,418,225Distributed electrode array for plasma processing201910,409,295Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)201910,395,964Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck201910,388,547Side storage pods, equipment front end modules, and methods for processing substrates201910,373,807Distributed electrode array for plasma processing201910,359,743Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls201910,312,056Distributed electrode array for plasma processing201910,217,650Methods and apparatus for substrate edge cleaning201910,056,274System and method for forming a sealed chamber20189,997,328System and method for forming a sealed chamber20189,986,598Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods20189,905,447'Sealed substrate carriers and systems and methods for transporting substrates'20189,831,111Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck20179,717,147'Electronic device manufacturing system'20179,698,041'Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods'20179,587,749'Slit valve with a pressurized gas bearing'20179,538,583'Substrate support with switchable multizone heater'20179,502,294'Method and system for wafer level singulation'20169,443,714'Methods and apparatus for substrate edge cleaning'20169,405,287'Apparatus and method for optical calibration of wafer placement by a robot'20169,177,842'Degassing apparatus adapted to process substrates in multiple tiers with second actuator'20159,147,592'Linked vacuum processing tools and methods of using the same'20159,111,980'Gas exhaust for high volume, low cost system for epitaxial silicon deposition'20159,004,107'Methods and apparatus for enhanced gas flow rate control'20158,991,785'Methods and apparatus for sealing a slit valve door'20158,880,210'Methods and apparatus for processing substrates using model-based control'20148,870,512'Sealed substrate carriers and systems and methods for transporting substrates'20148,796,589'Processing system with the dual end-effector handling'20148,580,615'Method and system for wafer level singulation'20138,550,031'Cluster tool architecture for processing a substrate'20138,473,247'Methods for monitoring processing equipment'20138,322,963'End effector for a cluster tool'20128,215,262'Cluster tool architecture for processing a substrate'20128,181,596'Cluster tool architecture for processing a substrate'20128,146,530'Cluster tool architecture for processing a substrate'20128,078,304'Dual-mode robot systems and methods for electronic device manufacturing'20118,020,689'Break-away positioning conveyor mount for accommodating conveyor belt bends'20118,019,467'Scheduling method for processing equipment'20117,967,996'Process for wafer backside polymer removal and wafer front side photoresist removal'20117,930,061'Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback'20117,927,062'Methods and apparatus for transferring substrates during electronic device manufacturing'20117,925,377'Cluster tool architecture for processing a substrate'20117,914,248'Methods and apparatus for repositioning support for a substrate carrier'20117,912,576'Calibration of high speed loader to substrate transport system'20117,857,570'Method and apparatus for supplying substrates to a processing tool'20107,833,351'Batch processing platform for ALD and CVD'20107,819,079'Cartesian cluster tool configuration for lithography type processes'20107,798,309'Stabilizing substrate carriers during overhead transport'20107,792,608'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20107,743,728'Cluster tool architecture for processing a substrate'20107,720,655'Extended mainframe designs for semiconductor device manufacturing equipment'20107,711,445'Systems and methods for transferring small lot size substrate carriers between processing tools'20107,694,647'Cluster tool architecture for processing a substrate'20107,684,895'Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event'20107,673,735'System for transporting substrate carriers'20107,627,395'Vision system'20097,611,318'Overhead transfer flange and support for suspending a substrate carrier'20097,597,183'Kinematic pin with shear member and substrate carrier for use therewith'20097,594,789'Overhead transfer flange and support for suspending a substrate carrier'20097,578,647'Load port configurations for small lot size substrate carriers'20097,577,487'Methods and apparatus for a band to band transfer module'20097,552,816'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,540,371'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,537,108'Methods and apparatus for transporting substrate carriers'20097,527,141'System for transporting substrate carriers'20097,522,968'Scheduling method for processing equipment'20097,506,747'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,506,746'System for transporting substrate carriers'20097,506,752'Methods and apparatus for transporting substrate carriers'20097,503,448'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,455,172'Break-away positioning conveyor mount for accommodating conveyor belt bends'20087,433,756'Calibration of high speed loader to substrate transport system'20087,409,263'Methods and apparatus for repositioning support for a substrate carrier'20087,407,081'Methods and apparatus for transferring conductive pieces during semiconductor device fabrication'20087,374,391'Substrate gripper for a substrate handling robot'20087,367,446'Methods and apparatus for transporting substrate carriers'20087,357,842'Cluster tool architecture for processing a substrate'20087,359,767'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20087,346,431'Substrate carrier handler that unloads substrate carriers directly from a moving conveyer'20087,335,462'Method of depositing an amorphous carbon layer'20087,299,831'Substrate carrier having door latching and substrate clamping mechanisms'20077,293,642'Methods and apparatus for transporting substrate carriers'20077,258,520'Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing'20077,243,003'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20077,234,584'System for transporting substrate carriers'20077,233,841'Vision system'20077,230,702'Monitoring of smart pin transition timing'20077,223,526'Method of depositing an amorphous carbon layer'20077,221,993'Systems and methods for transferring small lot size substrate carriers between processing tools'20077,168,553'Dynamically balanced substrate carrier handler'20077,156,221'Break-away positioning conveyor mount for accommodating conveyor belt bends'20077,085,622'Vision system'20067,077,264'Methods and apparatus for transporting substrate carriers'20067,039,501'Method for determining a position of a robot'20066,955,197'Substrate carrier having door latching and substrate clamping mechanisms'20056,841,341'Method of depositing an amorphous carbon layer'20056,797,189'Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon'20046,790,311'Plasma reactor having RF power applicator and a dual-purpose window'20046,736,931'Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor'20046,623,596'Plasma reactor having an inductive antenna coupling power through a parallel plate electrode'20036,582,175'Robot for handling semiconductor wafers'20036,573,030'Method for depositing an amorphous carbon layer'20036,556,887'Method for determining a position of a robot'20036,544,429'Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition'20036,524,432'Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density'20036,514,376'Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna'20036,454,898'Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners'20026,444,085'Inductively coupled RF plasma reactor having an antenna adjacent a window electrode'20026,440,866'Plasma reactor with heated source of a polymer-hardening precursor material'20026,440,221'Process chamber having improved temperature control'20026,365,063'Plasma reactor having a dual mode RF power application'20026,238,588'High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process'20016,218,312'Plasma reactor with heated source of a polymer-hardening precursor material'20016,165,311'Inductively coupled RF plasma reactor having an overhead solenoidal antenna'20006,095,083'Vacuum processing chamber having multi-mode access'20006,083,412'Plasma etch apparatus with heated scavenging surfaces'20006,077,384'Plasma reactor having an inductive antenna coupling power through a parallel plate electrode'20006,074,512'Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners'20006,063,233'Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna'20006,054,013'Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density'20006,036,877'Plasma reactor with heated source of a polymer-hardening precursor material'20006,024,826'Plasma reactor with heated source of a polymer-hardening precursor material'20006,019,360'Plastic pipe vise'20005,990,017'Plasma reactor with heated source of a polymer-hardening precursor material'19995,980,194'Wafer position error detection and correction system'19995,960,072'Method and apparatus for altering the access format of telephone calls'19995,925,212'Apparatus and method for attaining repeatable temperature versus time profiles for plasma heated interactive parts used in mass production plasma processing'19995,722,668'Protective collar for vacuum seal in a plasma etch reactor'19985,483,581'Method and apparatus for performing an automated collect call'19965,437,757'Clamp ring for domed pedestal in wafer processing chamber'19955,319,701'Method and apparatus for performing an automated collect call'19945,131,027'Short time validity storage'19925,113,433'Method and apparatus for altering the access format of telephone calls'19925,093,858'Method and apparatus for performing an automated collect call'19924,933,965'Short time validity storage of a billing account number at a local telecommunications station'19904,933,966'Method and apparatus for performing an automated collect call'19904,920,558'Method and apparatus for downloading speech files'19904,920,562'Automatic generation of billing records at a telephone paystation'19904,908,852'Method and apparatus for altering the access format of telephone calls'19904,890,317'Automatic validation of telephone account numbers'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–1999Patents assigned to INTELLICALL INC (11)· patent assignee history
1989–1999Based in Carrollton, TX, US· patent location history
1995–2020Patents assigned to APPLIED MATERIALS INC (131)· patent assignee history
1995–2020Based in Pleasanton, CA, US· patent location history
2000Based in Newalla, OK, US· patent location history
2011–2015Patents assigned to RICE MICHAEL R (6)· patent assignee history
2012–2013Patents assigned to SALEK MOHSEN S (5)· patent assignee history
2012–2013Patents assigned to ARMER HELEN R (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 131 | 1995–2020 |
| INTELLICALL INC | 11 | 1989–1999 |
| RICE MICHAEL Rself | 6 | 2011–2015 |
| SALEK MOHSEN S | 5 | 2012–2013 |
| ARMER HELEN R | 4 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pleasanton, California, US | 141 | 1995–2020 |
| Carrollton, Texas, US | 12 | 1989–1999 |
| Newalla, OK, US | 1 | 2000 |