LexDanaLexDanabeta
Inventor

Akimichi Yonekura

Inventor
Kawasaki, JP

Overview

2→
Patents
1994
Patent span
Chemistry
Primary field (CPC C)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
C30BSingle-crystal growth33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
5,316,472'Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus'19945,286,523'Method of processing substrates and substrate processing apparatus'1994

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1994Patents assigned to TOSHIBA KK (2)· patent assignee history
1994Patents assigned to TEL SAGAMI LTD (1)· patent assignee history
1994Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
1994Based in Kawasaki, JP· patent location history
1994Based in Yokohama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOSHIBA KK21994
TEL SAGAMI LTD11994
TOKYO ELECTRON LTD11994
Locations
LocationPatentsSpan
Kawasaki, JP11994
Yokohama, JP11994